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Water-cooled Thermo-chiller/High-performance Type HRW

Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible Products
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers)
    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　 Temperature Control Equipment/Precautions　 Features/Series Variations　 Technical Data　 Temperature Control Equipment Warranty　 Green Procurement (RoHS)　
Series Set temperature
range		 Cooling
capacity		 Temperature
stability		 Cooling
method		 Circulating fluid
HRW 20 to 90℃ 2 kW, 8 kW, 15 kW, 30 kW ±0.3℃ Water-cooled type
(Without compressor)		 Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

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