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- Air Management System
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Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
- Direct Operated 3/4/5 Port Solenoid Valves
- Reduced-wiring Fieldbus System (Serial Transmission System)
- Air Operated Valves
- Mechanical Valves/Transmitters
- Finger Valve/Hand Valves/Residual Relief 3 Port Valve
- Blow Guns
- Power Valves
- ISO Valves
- Explosion-Proof Valves
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Air Cylinders
- Standard Air Cylinders (Round Type）
- Standard Air Cylinders (Square Cover）
- Compact Air Cylinders
- Environment Resistant Cylinders
- Floating Joints/Rod End
- Air-hydro Units
- Mechanically Jointed Rodless Cylinders
- Magnetically Coupled Rodless Cylinders
- Table Cylinders
- Guide Cylinders
- Dual Rod Cylinders
- Lock Cylinders/Cylinder with An End Lock
- Fine Lock Cylinders
- Specialty Cylinders
- Clamp Cylinders
- Pin Shift Cylinder
- Stopper Cylinders
- Stroke Reading Cylinders
- Valve Mounted Air Cylinders
- ISO Cylinders
- Shock Absorbers
- Auto Switches
- Actuator Position Sensor
- Rotary Actuators/Air Grippers
- Electric Actuators/Cylinders
- Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Air Preparation Equipment
- Modular F.R.L./Pressure Control Equipment
- Lubrication Equipment
- Fittings and Tubing
- Flow Control Equipment
- Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
- Switches/Sensors/Controller
- Static Neutralization Equipment
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Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CANopen Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
- Process Valves
- Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Process Pumps(Diaphragm Pumps)
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Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers)
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
- Process Gas Equipment
- High Vacuum Equipment
- Industrial Filters/Sintered Metal Elements
- Pneumatic Instrumentation Equipment
- Hydraulic Equipment
Theme
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Clean Series/Low-Particle Generation
- Directional Control Valves
- Air Cylinders
- Rotary Actuators
- Air Grippers
- Air Dryers
- Compressed Air Cleaning Filter Series
- Clean Gas Filters/Air Filters
- Exhaust Cleaner for Clean Room/Clean Exhaust Filter
- Modular F.R./Pressure Control Equipment
- Fittings
- Tubing
- Flow Control Equipment
- Switches/Sensors
- Flow Switch
- Electric Actuators
- Fluoropolymer Equipment/PVC Equipment
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Series Compatible with Secondary Batteries Series 25A-
- Directional Control Valves
- Actuators
- Related Products
- Rotary Actuators/Air Grippers
- Vacuum Equipment
- Air Preparation Equipment/Clean Air Filters
- ModularF.R.L./Pressure Control Equipment
- Flow Control Equipment/Fittings
- Tubings
- Detection Switches/Auto Switches
- Process Valves
- Process Gas Equipment
- Electric Actuators
- Copper, Fluorine-free Equipment Series 20-
- ISO Products
- Arc Welding Process Equipment
- IO-Link Devices
- List of ATEX Compliant Products
Thermo-chiller/High-performance Type HRZ
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
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・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
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2D/3D CAD
The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.
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Thermo-chiller/High-performance Type HRZ
Manual
Series View search result HRZ View search result -
Thermo-chiller/High-performance Type HRZ
DoC
Series View search result HRZ View search result
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
