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Thermo-chiller/High-performance Inverter Type HRZ

Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
    ・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
    ・A wide temperature range and cooling capacity range are covered by one unit.
    ・Suited to the short innovation cycle of semiconductor equipment,
    　Capable of responding flexibly to changes in the process conditions
    ・Compliant with UL Standards, SEMI Standards, CE-marking

    ∗ The HRZ series will be discontinued in December 2022.
    　Please select the HRZ-F series.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
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  • Thermo-chiller/High-performance Inverter Type HRZ
    Manual
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  • Thermo-chiller/High-performance Inverter Type HRZ
    DoC
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Safety Instructions　 Temperature Control Equipment/Precautions　 Features/Series Variations　 Technical Data　 Temperature Control Equipment Warranty　 Green Procurement (RoHS)　
Series Set temperature
range		 Cooling
capacity		 Temperature
stability		 Cooling
method		 Circulating fluid
HRZ −20 to 90℃
10 to 60℃		 10 kW ±0.1℃ Water-cooled
refrigeration		 Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

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