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Modular F.R./Pressure Control Equipment
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|Clean Room Products
|Clean Blow Products
|Grease-free Products
Air Filter 10-/21-AF
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Filtration (μm) |
|---|---|---|
| 10-AF20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 5 |
| 21-AF20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 5 |
Mist Separator 10-/21-AFM
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Filtration (μm) |
|---|---|---|
| 10-AFM20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.3 |
| 21-AFM20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.3 |
Micro Mist Separator 10-/21-AFD
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Filtration (μm) |
|---|---|---|
| 10-AFD20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.01 |
| 21-AFD20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.01 |
Regulator 10-/21-AR
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| 10-AR20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
| 21-AR20 to 60 | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
Regulator with Backflow Function 10-/21-AR
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| 10-AR20K to 60K | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
| 21-AR20K to 60K | 1/8, 1/4, 3/8, 1/2, 3/4, 1 | 0.05 to 0.85 |
Filter Regulator 10-/21-AW
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) | Filtration (μm) |
|---|---|---|---|
| 10-AW20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
| 21-AW20 to 40 | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
Filter Regulator with Backflow Function 10-/21-AW□K
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) | Filtration (μm) |
|---|---|---|---|
| 10-AW20K to 40K | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
| 21-AW20K to 40K | 1/8, 1/4, 3/8, 1/2, 3/4 | 0.05 to 0.85 | 5 |
Mist Separator Regulator 10-/21-AWM
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) | Filtration (μm) |
|---|---|---|---|
| 10-AWM20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.3 |
| 21-AWM20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.3 |
Micro Mist Separator Regulator 10-/21-AWD
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) | Filtration (μm) |
|---|---|---|---|
| 10-AWD20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.01 |
| 21-AWD20 to 40 | 1/8, 1/4, 3/8, 1/2 | 0.05 to 0.85 | 0.01 |
Direct Operated Precision Regulator 10-/21-ARP
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
・Setting sensitivity: 0.2% F.S. or less
・Energy saving, reduces air consumption 80% (SMC comparison)
・Repeatability: ±1% F.S. or less (or ±3 kPa or less)
・With backflow function (ARP20K/30K/40K)
Can be mounted between a solenoid valve and a cylinder.
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| 10-/21-ARP20 (K) | 1/8・1/4 | 0.005 to 0.4MPa 0.005 to 0.2MPa 0.005 to 0.6MPa |
| 10-/21-ARP30 (K) | 1/4・3/8 | 0.005 to 0.4MPa 0.005 to 0.2MPa 0.005 to 0.6MPa |
| 10-/21-ARP40 (K) | 1/4・3/8・1/2 | 0.005 to 0.4MPa 0.005 to 0.2MPa 0.005 to 0.6MPa |
Precision Regulator 10-IR
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
・Tension control
・Contact pressure control
・Setting sensitivity: 0.2% F.S. or less
・Repeatability: ±0.5% F.S. or less
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| IR1000-A | 1/8 | 0.005 to 0.2 0.01 to 0.4 0.01 to 0.8 |
| IR2000-A | 1/4 | 0.005 to 0.2 0.01 to 0.4 0.01 to 0.8 |
| IR3000-A | 1/4，3/8，1/2 | 0.01 to 0.2 0.01 to 0.4 0.01 to 0.8 |
| IR1200-A | 1/8 | 0.02 to 0.2 0.02 to 0.4 0.02 to 0.8 |
| IR2200-A | 1/4 | 0.02 to 0.2 0.02 to 0.4 0.02 to 0.8 |
| IR3200-A | 1/4，3/8，1/2 | 0.02 to 0.2 0.02 to 0.4 0.02 to 0.8 |
| 10-IR1000 | 1/8 | 0.005 to 0.2 0.005 to 0.4 0.005 to 0.8 |
| 10-IR2000 | 1/4 | 0.005 to 0.2 0.005 to 0.4 0.005 to 0.8 |
| 10-IR3000 | 1/4, 3/8, 1/2 | 0.01 to 0.2 0.01 to 0.4 0.01 to 0.8 |
Vacuum Regulator 10-IRV
Clean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
Clean Series
・Allows adjustment of vacuum line pressure.
・Single sided connections series
・Weight reduced by 20% (Compared with the existing IRV2000 with IRV20 fitting)
・Built-in One-touch fittings
・Easy to attach/detach the pressure gauge or digital pressure switch due to attachment by clip.
・Mounting direction of the pressure gauge or digital pressure switch can be changed. (Standard connections only)
・Mounting angle of the pressure gauge or digital pressure switch can be changed easily (in 60 degree increments).
Safety Instructions
Features/Basic Specifications/Clean Series Precautions
F.R.L. Units/Precautions
Green Procurement (RoHS)
| Series | Port size | Set pressure (kPa) |
|---|---|---|
| 10-IRV | φ6, φ8, φ1/4, φ5/16 | -100 to -1.3 |
| 10-IRV20 | φ6, φ8, φ10, φ1/4, φ5/16, φ3/8 | -100 to -1.3 |
Clean Regulator SRH
Modular F.R.L./Pressure Control Equipment » RegulatorsClean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
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・Contamination-controlled stainless steel regulator
・Oil-free
・2 types of diaphragm materials: PTFE, Fluororubber
Safety Instructions
F.R.L. Units/Precautions
Series Variations/Pressure Control Equipment
Product Selection Guide
Green Procurement (RoHS)
| Series | Relief mechanism | Port size | Set pressure (MPa) |
|---|---|---|---|
| SRH | Non-relief | Rc1/8，1/4，3/8，1/2 9/16-18UNF，7/8-14UNF |
Low pressure type：0.02 to 0.2 High pressure type：0.05 to 0.7 |
| SRH | Relief | Rc1/8，1/4，3/8，1/2 | Low pressure type：0.02 to 0.2 High pressure type：0.05 to 0.7 |
Precision Clean Regulator SRP
Modular F.R.L./Pressure Control Equipment » RegulatorsClean Series/Low-Particle Generation » Modular F.R./Pressure Control Equipment
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・High-precision low flow consumption stainless steel regulator
・Bleed air flow of 0.5 L/min (ANR) or less (0.2 MPa at outlet pressure)
・Setting sensitivity: 0.3% F.S.
・Repeatability: 1% F.S.
Safety Instructions
F.R.L. Units/Precautions
Series Variations/Pressure Control Equipment
Product Selection Guide
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| SRP | M5，1/8 | Low pressure type：0.005 to 0.2 High pressure type：0.01 to 0.4 |
