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Slit Valve XGT
High Vacuum Equipment » Slit Valves
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・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
| Series | Operating environmental pressure (Pa)(abs) |
Fluid | Opening window size (Height x Width) (mm) |
Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 |
Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 |
0.45 to 0.6 |
