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High Vacuum
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Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ
High Vacuum Equipment » High Vacuum Valves
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・One-touch connection and release (No tools are required.)
Safety Instructions
System Configuration/Series Variations
Auto Switches Common Specifications
Green Procurement (RoHS)
| Series | Actuation | Shaft seal type |
Valve type |
Material | Flange size |
|---|---|---|---|---|---|
| XLAQ | Air operated |
Bellows seal | Single acting (N.C.) |
Body : Aluminum Bellows : Stainless steel 316L |
16 to 50 |
| XLDQ | Air operated |
Bellows seal O-ring seal |
Single acting (N.C.) |
Body : Aluminum Bellows : Stainless steel 316L |
40, 50 |
