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Introduction of Products by Theme / Industry » Photovoltaic Cell Manufacturing Process Equipment »
Temperature Control
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Water-cooled Thermo-chiller/High-performance Type HRW
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsTemperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
Temperature Control Equipment » Thermo-Chillers (Circulating Fluid Temperature Controllers)
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・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
