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7. Drying ⁄ UV Irradiation
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|7. Drying ⁄ UV Irradiation
After drying and fixing the coating material to the film, UV irradiation is used to harden the surface.
Thermo-chiller/High-performance Type HRZ
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
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・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
