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Other: RS485 Compatible Products
Other: RS485 Compatible Products
Thermo-chiller/Standard Type HRS
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・With this chiller, cooling water can be obtained anywhere it is necessary because of easy installation and easy operation.
・For a wide range of applications, such as laser machine tools, analytical equipment,
LCD manufacturing equipment, mold temperature control, etc.
・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
・Timer function, Low liquid level protection, Power failure auto-restart,
Anti-freezing function, etc.
・Self diagnosis function
・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
・Compliant with UL Standards, CE-marking
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Can be used in a wide range of applications!
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS012 to 060 | 5 to 40℃ | 1.3 kW 1.9 kW 2.4 kW 3.2 kW 4.2 kW 5.1 kW 5.9 kW （60 Hz） |
±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution （15％） |
Thermo-chiller/Environmentally Resistant Type HRS-R
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・Resistant to dust and water splashing
・Protection of the electrical unit: IP54
・Metal panel
The entire exterior surface is metal.
A stainless steel panel can be selected. (Option)
・A large capacity tank (12 L) is available. (Option)
・Ambient temperature: 5 to 45°C
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS-R | 5 to 40℃ | 1.9 kW 2.9 kW 5 kW (60 Hz) |
±0.1℃ | Air-cooled refrigeration | Tap water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Standard Type HRS090
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・Lightweight and compact
・Cooling capacity: 9 kW
・Temperature stability: ±0.5°C
・Set temperature range: 5 to 35°C
・Max. ambient temperature: 45°C
・Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC, 460 to 480VAC
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Can be used in a wide range of applications!
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS090 | 5 to 35℃ | 9kW (60Hz) | ±0.5℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution （15％） |
Thermo-chiller/Standard Type HRS100/150
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・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
・Low-noise design: 70 dB (A)
・Outdoor installation: IPX4
・Compact, Space saving
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Can be used in a wide range of applications!
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS100 HRS150 |
5 to 35℃ | 9.5 kW 14.5 kW (60 Hz) |
±1.0℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Standard Type HRS200
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・3-phase 380 to 415 VAC (50 Hz), 3-phase 460 to 480 VAC (60 Hz)
・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
・Outdoor installation: IPX4
・Compact, Space saving
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRS200 | 5 to 35℃ | 20.5 kW | ±1.0℃ | Air-cooled refrigeration | Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Inverter Type HRSH090
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・Power consumption reduced by 53%
Complete with energy-saving triple inverter!
・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
・Temperature stability: ±0.1°C
・Set temperature range: 5°C to 40°C
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Can be used in a wide range of applications!
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH090 | 5 to 40℃ | 9.5 kW | ±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Inverter Type HRSH
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・Complete with energy-saving triple inverter!
・Outdoor installation, Splashproof type (IPX4)
・Max. ambient temperature: 45℃
・Min. ambient temperature: –20℃ (For the air-cooled type)
・Temperature stability: ±0.1℃ (When a load is stable)
・Space saving and lightweight: 280 kg (25 kW type)
・Compliant with UL Standards, CE-marking
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Can be used in a wide range of applications!
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRSH | 5 to 35℃ | 10 kW 15 kW 20 kW 25 kW 28 kW |
±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Deionized water Ethylene glycol aqueous solution (15%) |
Thermo-chiller/Dual Channel Thermo-chiller for Lasers HRL
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・Temperatures for 2 fluid channel systems can be controlled individually
by one chiller.
・Space saving, Reduced wiring
Footprint: 22% reduction
One power supply system for 2 channels
・Energy saving
Power consumption reduced by 30%
・Touch panel
・Power supply:
3-phase 200 VAC (50 Hz)
3-phase 200 to 230 VAC (60 Hz)
3-phase 380 to 415 VAC (50/60 Hz)
3-phase 460 to 480 VAC (60 Hz)
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Can be used in a wide range of applications!
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRL100 HRL200 HRL300 HRL400 |
CH1: 15 to 25℃ CH2: 20 to 40℃ |
CH1:9 kw, 19 kW, 26 kW, 37kw CH2: 1.0 kW (Max. 1.5 kW) |
CH1: ±0.1 CH2: ±0.5 |
Air-cooled refrigeration Water-cooled refrigeration |
Tap water, Deionized water |
Thermo-chiller/Rack Mount Type HRR
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・Operable without the need to remove the unit from the rack
Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
・Space saving: Multiple chillers can be mounted to a 19-inch rack.
・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
・Temperature stability: ±0.1℃
・Global power supply:
Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz)
Single-phase 200 to 230 VAC (50/60 Hz)
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method | Circulating fluid |
|---|---|---|---|---|---|
| HRR | 5 to 35℃ 15 to 35℃ |
1.1 kW 1.2 kW 1.8 kW 2.4 kW 3.0 kW 5.1 kW |
±0.1℃ | Air-cooled refrigeration Water-cooled refrigeration |
Tap water Ethylene glycol aqueous solution (15%) |
EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
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・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
・Energy saving
The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
Power consumption: Max. 65% reduction
Facility water: Max. 67% reduction
・High performance
Temperature stability: ±0.1°C (When a load is stable)
Cooling time: Max. 46% reduction (SMC comparison)
・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ-F | -20 to 40℃ 10 to 60℃ -20 to 90℃ |
2 kW, 4 kW, 8 kW, 10 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated fluids Ethylene glycol aqueous solution Tap water/Deionized water |
Thermo-chiller/High-performance Type HRZ
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・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Thermo-chiller/High-performance Inverter Type HRZ
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・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | −20 to 90℃ 10 to 60℃ |
10 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
