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2. Flow Casting
|2. Flow Casting
After casting in the direction of the axle
using a die, a PET sheet is created by
attaching to a cooling drum and solidifying
it with rapid cooling.
Thermo-chiller/High-performance Type HRZ
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・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
---|---|---|---|---|---|
HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |