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“Inert Gas”“ Clean Dry Air” Line
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Clean Gas Filter SF
Air Preparation Equipment » Air Preparation FiltersClean Series/Low-Particle Generation » Clean Gas Filters/Air Filters
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・Cartridge type allows for element replacement
(SFA100/200/300, SFB100)
・Compact, disposable type for the semiconductor industry
(SFB300, SFC100)
Safety Instructions
Air Preparation Equipment/Precautions
Model Selection Guide/Quick Reference Guide
Green Procurement (RoHS)
| Type | Series | Operating pressure | Filtration (μm) |
|---|---|---|---|
| Cartridge type disc | SFA100/200/300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
| Cartridge type straight | SFB200 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
120 |
| Disposable type straight | SFB300 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
| Disposable type multiple disc | SFC100 | Max. 0.99 MPa （Vacuum: 1.3×10－6 kPa） |
0.01 (Filtration efficiency: 99.99%) |
