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Clean Gas Filters/Air Filters

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Clean Gas Filter SF

    ・Cartridge type allows for element replacement
    　 (SFA100/200/300, SFB100)
    ・Compact, disposable type for the semiconductor industry
    　(SFB300, SFC100)
Safety Instructions　 Air Preparation Equipment/Precautions　 Model Selection Guide/Quick Reference Guide　 Green Procurement (RoHS)　
Type Series Operating pressure Filtration (μm)
Cartridge type disc SFA100/200/300 Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		 0.01
(Filtration efficiency: 99.99%)
Cartridge type straight SFB100 Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		 0.01
(Filtration efficiency: 99.99%)
Cartridge type straight SFB200 Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		 120
Disposable type straight SFB300 Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		 0.01
(Filtration efficiency: 99.99%)
Disposable type multiple disc SFC100 Max. 0.99 MPa
（Vacuum: 1.3×10－6 kPa）		 0.01
(Filtration efficiency: 99.99%)

Clean Air Filter/Hollow Fiber Element SFD

    ・Built-in hollow fiber element
    ・Pressure drop: 0.03 MPa (Inlet pressure 0.7 MPa, Max. flow rate)
    ・Compliant with the RoHS Directives regulations regarding the reduction
    　of environmentally detrimental chemicals
    ・Metal Case Type (Made to Order)
    　Stainless steel, Aluminum cases
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
  • Clean Air Filter/Hollow Fiber Element SFD
    Manual
    Series Type View search result
    SFD100 Disposable type
    (Non-replaceable element)    		 View search result
    SFD110 Disposable type
    (Non-replaceable element)    		 View search result
    SFD200 Cartridge type
    (Replaceable element)    		 View search result
Safety Instructions　 Air Preparation Equipment/Precautions　 Model Selection Guide/Quick Reference Guide　 Green Procurement (RoHS)　
Series Type Flow rate L/min (ANR)
(At inlet pressure 0.7 MPa)		 Operating pressure Filtration (μm)
SFD100 Disposable type
(Non-replaceable element)		 to 100 Max.1.0MPa 0.01
(Filtration efficiency: 99.99%)
SFD110 Disposable type
(Non-replaceable element)		 to 120 Max.1.0MPa 0.01
(Filtration efficiency: 99.99%)
SFD200 Cartridge type
(Replaceable element)		 to 500 Max.1.0MPa 0.01
(Filtration efficiency: 99.99%)

Clean Air Module LLB

    ・Modularized clean equipment (Reduced piping labor/Space saving)
    　Makes clean air easily available
    ・Nominal filtration rating: 0.01 μm (Filtration efficiency: 99.99%)
    ・Wetted parts: Grease-free, Silicone-free
    ・Assembled in a clean room, Shipped and packed in double packaging
    ・24 combinations are available.

    　Note) Inlet air conditions ISO 8573-1 Quality grade: Equivalent to 1.4.1 to 1.6.1
Safety Instructions　 Air Preparation Equipment/Precautions　 Model Selection Guide/Quick Reference Guide　 Green Procurement (RoHS)　
Series Fluid Set pressure Flow range L/min (ANR)
LLB3 Clean air
N2 gas Note)		 0.05 to 0.4 MPa 5 to 100
LLB4 Clean air
N2 gas Note)		 0.05 to 0.4 MPa 50 to 500

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