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Temperature Control
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Thermo-chiller/High-performance Type HRZ
Industrial Device Communication Equipment/Wireless System » Industrial Device Communication Equipment: DeviceNet Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS232C Compatible Products
Industrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
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・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Thermo-chiller/High-performance Inverter Type HRZ
Industrial Device Communication Equipment/Wireless System » Other: RS232C Compatible ProductsIndustrial Device Communication Equipment/Wireless System » Other: RS485 Compatible Products
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・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | −20 to 90℃ 10 to 60℃ |
10 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
