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|Air Cylinders

Standard Air Cylinders

Product name	Series/Model	Download	Replacement Procedure	Note
Air Cylinder Air Cushion	CM2-Z	English

Compact Air Cylinders

Product name	Series/Model	Download	Replacement Procedure	Note
Free Mount Cylinder	CU	English

|Vacuum Equipment

Vacuum Ejector / Vacuum Pump System

Product name	Series/Model	Download	Note
Vacuum Manifold for fieldbus system	ZKJ	English
SI Unit for Vacuum Manifold (ZKJ)	EX260-VPN1	English Configuration File
SI Unit for Vacuum Manifold (ZKJ) IO-Link Compatible	EX260-VIL1	English Configuration File	Configuration file: IODD file
Vacuum Unit	ZK2□A	English
Vacuum Unit Vacuum Ejectors/Vacuum Pump Systems	ZK2	English
Compact Vacuum Unit Ejector / Vacuum Pump System	ZB	English Chinese
Vacuum Unit (Vacuum Generators)	ZQ□A	English Chinese
Space Saving Vacuum Ejector/Pump System	ZQ	English
Vacuum Ejector Body ported type Z Box type (Built-in silencer)	ZH	English
Vacuum Pad with Ejector	ZHP	English

Gripper Unit for Collaborative Robots

Product name	Series/Model	Download
Vacuum Gripper Unit for the FANUC CORPORATION CRX Series	ZXP7□21-X1	English
Vacuum Gripper Unit for Kawasaki Heavy Industries, duAro1,2 Robot	ZXP7□-X1□-KA	English
Vacuum Gripper Unit for the Mitsubishi Electric Corporation MELFA ASSISTA Series	ZXP7□-X1□-ASSISTA	English
Vacuum Gripper Unit for Collaborative Robots for Universal Robots	ZXP7□01-X1	English
Vacuum Gripper Unit for Collaborative Robots for OMRON, TECHMAN ROBOT Inc. TM Series	ZXP7□41-X1	English
Vacuum Gripper Unit for the YASKAWA Electric Corporation MOTOMAN-HC	ZXP7□11-X1□ ZXP7□12-X1□	English

|Modular F.R.L./Pressure Control Equipment

Regulators

Product name	Series/Model	Download	Replacement Procedure	Note
Vacuum Regulator	IRV10/20	English

|Switches/Sensors

Pressure Switches/Sensors

Product name	Series/Model	Download	Replacement Procedure	Note
2-color High Accuracy Digital Pressure Switch	ZSE30A(F)/ISE30A	English Chinese Quick Guide		Digital Switch Setting System
2-color High Accuracy Digital Pressure Switch	ZSE40A(F)/ISE40A	English Chinese Quick Guide		Digital Switch Setting System

|High Vacuum Equipment

High Vacuum Valves

Product name	Series/Model	Download
Aluminum High Vacuum Angle Valve Normally Closed / Bellows Seal	XLA-2	English Chinese
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Normally Closed / Bellows Seal	XLAV-2	English
Aluminum High Vacuum Angle Valve Doubleacting / Bellows seal	XLC-2	English
Aluminum High Vacuum Angle Valve Normally Closed/O-ring Seal	XLF-2	English
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Normally Closed/O-ring Seal	XLFV-2	English
Aluminum High Vacuum Angle Valve Doubleacting / O-ring seal	XLG-2	English
Aluminum High Vacuum Angle Valve Normally Closed / Bellows Seal	XLA	English
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Normally Closed/Bellows Seal	XLAV	English
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Normally Closed/Bellows Seal CE-compliant	XLAV-Q	English
Aluminum High Vacuum Angle Valve Normally Closed/Bellows Seal With heat resistant auto switch	XLA-F7NJ	English
Aluminum High Vacuum Angle Valve Double Acting/Bellows Seal	XLC	English Chinese
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Double Acting/Bellows Seal	XLCV	English
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Double Acting/Bellows Seal With heat resistant auto switch	XLC-F7NJ	English
AluminumHigh Vacuum Angle Valve 2-Step Control, Single Acting/ Bellows Seal, O-ring Seal	XLD	English Chinese
AluminumHigh Vacuum Angle Valve Air Operated/with Solenoid Valve 2-Step Control, Single Acting/ Bellows Seal, O-ring Seal	XLDV	English
Aluminum High Vacuum Angle Valve Normally Closed/O-ring Seal	XLF	English
Aluminum High Vacuum Angle Valve Normally Closed/O-ring Seal Made to Order Specifications	XLFR	English
Aluminum High Vacuum Angle Valve Double Acting/O-ring Seal	XLG	English
Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve Double Acting/O-ring Seal	XLGV	English
Aluminum High Vacuum Angle Valve Double Acting/O-ring Seal Made to Order Specifications	XLGR	English
Aluminum High Vacuum Angle Valve Manual/Bellows Sea	XLH	English Chinese
Aluminum High Vacuum Angle Valve Electromagnetic/ Bellows Pressure Balance	XLS	English
Aluminum High Vacuum Angle Valve Vacuum Pilot	XLJ	English
Aluminum One-touch Connection and Release High Vacuum Angle	XLAQ/XLDQ	English
Stainless Steel High Vacuum Angle/In-line Valve Normally Closed / Bellows Seal	XMA/XYA	English
Stainless Steel High Vacuum Angle/In-line Valve Double Acting/Bellows Seal	XMC/XYC	English
Stainless Steel High Vacuum Angle/In-line Valve 2-Step Control, Single Acting/ Bellows Seal, O-ring Seal	XMD/XYD	English
Stainless Steel High Vacuum Angle/In-line Valve Manual/Bellows Sea	XMH/XYH	English
High Vacuum Solenoid Valve	XSA	English

Rodless Cylinder for Vacuum

Product name	Series/Model	Download	Replacement Procedure	Note
Rodless Cylinder for Vacuum	CYV	English

|Pneumatic Instrumentation Equipment

Positioners

Product name	Series/Model	Download	Replacement Procedure	Note
Electro-Pneumatic Positioner/ With Output Current(4～20mADC)	IP8100	English

Actuators

Product name	Series/Model	Download	Replacement Procedure	Note
Example of fail s afe circuit for a ir s ervo c ylinder IN 777	IN-777	English

Operation Manuals