5 Port Solenoid Valve 10-SY

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Series	Sonic conductance: C	Cylinder size	Power consumptio (W)
10-SY3000	1.1dm³(s・bar)	φ40	0.35
10-SY5000	2.8dm³(s・bar)	φ63	0.35
10-SY7000	4.5dm³(s・bar)	φ80	0.35
10-SY9000	10dm³(s・bar)	φ100	0.35

5 Port Solenoid Valve 10-SV

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Sonic conductance: C	Cylinder size	Power consumption (W)
10-SV1000	1.1dm³(s・bar)	φ40	0.6
10-SV2000	2.8dm³(s・bar)	φ63	0.6
10-SV3000	4.5dm³(s・bar)	φ80	0.6
10-SV4000	10dm³(s・bar)	φ100	0.6

4/5 Port Solenoid Valve 10-SYJ

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Sonic conductance: C	Cylinder size	Power consumption (W)
10-SYJ3000	0.46dm3(s・bar)	φ25	0.35
10-SYJ5000	0.83dm3(s・bar)	φ40	0.35
10-SYJ7000	2.9dm3(s・bar)	φ50	0.35

5 Port Solenoid Valve 10-SZ

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Sonic conductance: C	Cylinder size	Power consumption (W)
10-SZ3000	0.77dm³(s・bar)	φ32	0.6

5 Port Solenoid Valve 10-S0700

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Flow rate characteristics 1→4/2（P→A/B） C［dm³/（s・bar）］	Flow rate characteristics 1→4/2（P→A/B） b	Flow rate characteristics 1→4/2（P→A/B） Cv	Cylinder size	Power consumption (W)
10-S0700	0.39	0.39	0.11	φ25	0.35

5 Port Solenoid Valve 10-VQ

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Flow rate characteristics 2/4→3/5 (A/B→R1/R2) C [dm³/(s・bar)]	Flow rate characteristics 2/4→3/5 (A/B→R1/R2) b	Flow rate characteristics 2/4→3/5 (A/B→R1/R2) Cv	Cylinder size	Power consumption (W)
10-VQ1000	1.0	0.30	0.25	φ40	0.4 (Basic)
10-VQ2000	3.2	0.30	0.80	φ63	0.4 (Basic)

5 Port Solenoid Valve 10-SQ

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Sonic conductance: C	Cylinder size	Power consumption (W)
10-SQ1000	0.83dm³(s・bar)	φ32	1.0
10-SQ2000	2.9dm³(s・bar)	φ63	1.0

4 Port Solenoid Valve / Direct Operated Poppet Type 10-VQD

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Sonic conductance: C	Cylinder size	Power consumption (W)
10-VQD1000	0.19dm³(s・bar)	φ25	2.0

3 Port Solenoid Valve 10-V100

Clean Series/Low-Particle Generation » Directional Control Valves

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Model	Type	Sonic conductance: C	Power consumption (W)
10-V100	Standard type	0.037dm³(s・bar)	0.35＊(0.1)
10-V100	Large flow type	0.076dm³(s・bar)	1.0

3 Port Solenoid Valve 10-SYJ

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Sonic conductance: C	Power consumption (W)
10-SYJ300	0.36dm³(s・bar)	0.35
10-SYJ500	1.2dm³(s・bar)	0.35
10-SYJ700	3.0dm³(s・bar)	0.35

3 Port Solenoid Valve 10-SY

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Type	Sonic conductance: C	Power consumption (W)
10-SY100	Standard type	＊0.14mm²	0.5
10-SY100	Large flow type	＊0.22mm²	0.5

3 Port Solenoid Valve 10-S070

Clean Series/Low-Particle Generation » Directional Control Valves

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Series	Flow rate characteristics C[dm³/(s·bar)]	Flow rate characteristics b	Flow rate characteristics Cv	Power consumption (W)	Max. operating pressure: MPa
10-S070	0.042	0.27	0.011	0.5	0.5
10-S070	0.060	0.28	0.016	0.5	0.3
10-S070	0.042	0.27	0.011	0.35	0.3
10-S070	0.060	0.28	0.016	0.35	0.1
10-S070	0.021	0.27	0.006	0.1 (With power saving circuit)	0.3
10-S070	0.042	0.28	0.011	0.1 (With power saving circuit)	0.1

Film Manufacturing Process Equipment

|6. Coating

5 Port Solenoid Valve 10-SY

5 Port Solenoid Valve 10-SV

4/5 Port Solenoid Valve 10-SYJ

5 Port Solenoid Valve 10-SZ

5 Port Solenoid Valve 10-S0700

5 Port Solenoid Valve 10-VQ

5 Port Solenoid Valve 10-SQ

4 Port Solenoid Valve / Direct Operated Poppet Type 10-VQD

3 Port Solenoid Valve 10-V100

3 Port Solenoid Valve 10-SYJ

3 Port Solenoid Valve 10-SY

3 Port Solenoid Valve 10-S070