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High Vacuum Valves

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
    　Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
    　Increased flexibility of mounting orientation
    ・Lightweight, Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　 Auto Switches Common Specifications　 Green Procurement (RoHS)　
Series Actuation Valve
type		 Shaft seal
type		 Application Flange
size
XLA-100/160-X152 Air
operated		 Single
acting
(N.C.)		 Bellows seal Dust free,
Cleaned		 100，160
XLC-100/160-1-X152 Air
operated		 Double
acting		 Bellows seal Dust free,
Cleaned		 100，160

Features

■Improved durability of bellows (Flange sizes 100 and 160)
■Service life of two million cycles∗1

　∗1 The service life is based on SMC's testing. Refer to the operation manual for details.

■Space required for equipment can be reduced
■Lightweight, Compact

Large conductance, small body, excellent
resistance against fluorine corrosion (body)

■Variations

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