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Process Gas Equipment

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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

Features
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Body material: 316L SS secondary remelt or 316L SS
    ・Electropolished wetted parts
    ・External metal seal construction
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Application Body material Connection type Connection size
AP/SL Single stage Distribution (Compact) 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
AP/SL Single stage Distribution 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''
AP/SL Single stage Bulk gas 316L SS Face seal
Tube weld		 1/2'', 3/4'', 1''
AP/SL Single stage Source 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''
AP/SL Single stage Sub-atmospheric pressure 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''
AP Two stage Source 316L SS
secondary remelt		 Face seal
Tube weld		 1/4''，3/8''
AZ Single stage Distribution 316L SS Face seal
Tube weld		 1/4'', 3/8''
1/2''
AZ Single stage Source 316L SS Face seal
Tube weld		 1/4'', 3/8''
1/2''
AZ Single stage Sub-atmospheric pressure 316L SS Face seal
Tube weld		 1/4'', 3/8''
1/2''

Regulator/Back Pressure Regulator for General Applications AK/BP

Features
    ・For a wide variety of applications from semiconductor to general
    ・Body material of 316 SS or brass is available depending on the gas.
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Application Body material Connection type Connection size
AK Single stage Distribution 316 SS
or Brass		 NPT female, Compression 1/4'', 3/8''
1/2''
AK Single stage Source 316 SS
or Brass		 NPT female, Compression 1/4'', 3/8''
1/2''
AK Single stage Sub-atmospheric pressure 316 SS
or Brass		 NPT female, Compression 1/4'', 3/8''
1/2''
AK Two stage Source 316 SS
or Brass		 NPT female, Compression 1/4''
BP Back pressure regulator ― 316 SS
or Brass		 NPT female, Compression 1/4''

Diaphragm Valve for Ultra High Purity AP

Features
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Used as a gas shutoff valve
    ・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Body material Connection type Connection size
AP Air operated type 316L SS
secondary remelt		 Face seal
Tube weld		 1/4''，3/8''
1/2''，3/4''
AP Manually operated 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''

Diaphragm Valve for Ultra High Purity AZ

    ・Cleaned for high purity semiconductor applications and clean room assembled
    ・Helium leak tested
    ・SEMI Standards compliant
    ・User-friendly forged body
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Body material Connection type Connection size
AZ Air operated type 316L SS Face seal
Tube weld		 1/4''
3/8''
1/2
AZ Manually operated 316L SS Face seal
Tube weld		 1/4''
3/8''
1/2

Check Valve/Vacuum Generator/Flow Switch AP

Features
    [Check valve]
    ・Fluid backflow is prevented by back pressure.
    ・Unique design with only one moving part in the gas stream, an O-ring
    ・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

    [Vacuum generator]
    ・Vacuum generation equipment
    ・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

    [Flow switch]
    ・Detects excess flow above a given flow rate caused by pipe breakage, etc.
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Body material Connection type Connection size
AP Check valve 316L SS secondary remelt Face seal
Tube weld		 1/4'', 3/8''
AP Vacuum generator 316L SS Face seal
Tube weld		 1/4'', 3/8''
AP Flow switch 316L SS secondary remelt
316L SS		 Face seal
Tube weld		 1/2'', 3/4''

Diaphragm Valve for General Applications AK

Features
    ・Rc, R, and NPT connections have been added to the series.
    ・For a wide variety of applications from semiconductor to general
    ・Cleaned for O2 service
    ・Compact and lightweight due to the shortening of the actuator (AK3542/4542)
    ・M5 actuation port (AK3542/4542)
    ・Compact and lightweight due to the modifying of the knob design (AK3652/4652)
    ・The knob features a unique design that combines a scalloped round knob with a raised rectangular section to provide two choices of gripping. (AK3652/4652)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Body material Connection type Connection size
AK Air operated type 316 SS Compression
Rc, R, NPT		 1/4''，3/8''
AK Manually operated 316 SS Compression
Rc, R, NPT		 1/4''，3/8''

Regulator for General Applications AK1000T

    ・For a wide variety of applications from semiconductor to general
    ・Compact and lightweight
    　Weight: 0.52 kg, Height: 97.5 mm
    ・Minimum dead leg construction
    ・Various piping configurations are available:
    　Select from compression, NPT female, or Rc thread.
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　

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