High Vacuum Valves
Aluminum High Vacuum Angle Valve XL□
-
・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
| Series | Actuation | Valve type |
Shaft seal type |
Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated |
Single acting (N.C.) |
Bellows seal | Dust-free Cleaned |
16 to 160 |
| XLAV (With solenoid valve) |
Air operated |
Single acting (N.C.) |
Bellows seal | Dust-free Cleaned |
16 to 160 |
| XLC | Air operated |
Double acting |
Bellows seal | Dust-free Cleaned |
16 to 160 |
| XLCV (With solenoid valve) |
Air operated |
Double acting |
Bellows seal | Dust-free Cleaned |
16 to 80 |
| XLF | Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLFV (With solenoid valve) |
Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLG | Air operated |
Double acting |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLGV (With solenoid valve) |
Air operated |
Double acting |
O-ring seal | High-speed operation High operating cycles |
16 to 80 |
| XLD | Air operated |
Single acting (N.C.) |
Bellows/O-ring seal |
For preventing dust turbulence For preventing a pump from running overloaded |
25 to 160 |
| XLDV (With solenoid valve) |
Air operated |
Single acting (N.C.) |
Bellows/O-ring seal |
For preventing dust turbulence For preventing a pump from running overloaded |
25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned |
16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) |
(Bellows balance) | For portable equipment not requiring air |
16, 25 |
Features
Uniform baking temperature
Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve.
Lightweight, Compact
Large conductance, small body, excellent resistance against fluorine corrosion (body)
Low outgassing
Low outgassing makes it possible to use a lower capacity pump and also to shorten exhaust time.
Little heavy metal contamination
The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
(Bellows seal type)
Bellows assembly can be replaced which reduces maintenance costs and waste materials.
・Ambient temperature: Max. 150° C (Sensor)
・2-color indicator
For 100/120° C
