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Vacuum Angle Valve with Release Valve XLJ

    ・Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber
    ・Reduced piping labor due to the built-in release valve structure
  • Vacuum Angle Valve with Release Valve XLJ
    Manual
    Series View search result
    XLJ View search result
Series Actuation Valve
type
Shaft seal
type
Flange
size
XLJ Electromagnetic Normally closed/Vacuum pilot O-ring seal 25, 40

Features

Prevents the reverse flow of oil through the roughing pump (rotary pump) into the chamber

Reduced piping labor due to the built-in release valve structure

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