Product Information »
WEB Catalog
»
High Vacuum Equipment
»
Slit Valves
Slit Valves
For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
-
・Long service life: 3 million cycles (within standard temperature range)
・Low particle generation: Reduced by 1/5 or more
(compared with the existing product)
・Easier maintenance
Easy replacement of bellows
Gate can be replaced from above. (Made to order)
・Safety measures
A mechanical end lock mechanism has been adopted.
| Series | Operating environmental pressure (Pa)(abs) |
Fluid | Opening window size (Height x Width) (mm) |
Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGTP | Atmospheric pressure to 10-6 |
Inert gas | 50 x 336 | 0.45 to 0.6 |
Slit Valve XGT
-
・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
| Series | Operating environmental pressure (Pa)(abs) |
Fluid | Opening window size (Height x Width) (mm) |
Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 |
Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 |
0.45 to 0.6 |
