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Slit Valves

For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP

    ・Long service life: 3 million cycles (within standard temperature range)
    ・Low particle generation: Reduced by 1/5 or more
    　(compared with the existing product)
    ・Easier maintenance
    　Easy replacement of bellows
    　Gate can be replaced from above. (Made to order)
    ・Safety measures
    　A mechanical end lock mechanism has been adopted.
  • 2D/3D CAD

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  • For 300 mm Wafer: Parallel Seal Type Slit Valve XGTP
    Manual
    Series View search result
    XGTP View search result
Safety Instructions　 System Configuration/Series Variations　 Green Procurement (RoHS)　
Series Operating environmental
pressure (Pa)(abs)		 Fluid Opening window size
(Height x Width)
(mm)		 Operating
pressure
(MPa)(G)
XGTP Atmospheric pressure
to 10-6		 Inert gas 50 x 336 0.45 to 0.6

Features

Long service life 3 million cycles (at ordinary temperature)
Low particle generation Reduced by 1/5 or more

Low particle generation and longer service life through the use of a parallel sealing motion

The gate moves vertically upward and downward, gate sealing/clamping is made with a parallel motion.

Easier maintenance

Easy replacement of bellows



Gate can be replaced from above. (Made to order)

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