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Industrial Device Communication Equipment: DeviceNet Compatible Products
Industrial Device Communication Equipment: DeviceNet Compatible Products
Thermo-chiller/High-performance Type HRZ
-
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking
∗ The HRZ series will be discontinued in December 2022.
Please select the HRZ-F series.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRZ | -20 to 40℃ 20 to 90℃ -20 to 90℃ |
1 kW, 2 kW, 4 kW, 8 kW | ±0.1℃ | Water-cooled refrigeration |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
Serial Transmission System EX260
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For Output
∗The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
・IP67
・RJ45 communication connectors (X205)
▶IO-Link Master
Safety Instructions
3/4/5 Port Solenoid Valves/Precautions
Fieldbus System Precautions
Industrial IoT Cybersecurity
Glossary of Fieldbus Terms
Series Variations/Applicable Valve Series
Safety over Fieldbus with PROFIsafe
Green Procurement (RoHS)
IO-Link Master
| Series | Enclosure | Communication protocol∗ | Applicable valve |
|---|---|---|---|
| EX260 | IP67 | DeviceNet™ PROFIBUS DP CC-Link EtherCAT PROFINET EtherNet/IP™ Ethernet POWERLINK IO-Link (Only available for SY, JSY, VQC communication connectors) PROFIsafe (Only available for SY, JSY, VQC communication connectors) |
SY3000，5000，7000 (Plug-in) JSY1000，3000，5000 (Plug-in) VQC1000，2000，4000，5000 SV1000，2000，3000 S0700（IP40） |
Serial Transmission System EX120/121/122/124/126/140/180
-
For Output
∗The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
∗The NKE Corp. Fieldbus H System was discontinued in February 2021.
Please consider switching to a different network.
Safety Instructions
3/4/5 Port Solenoid Valves/Precautions
Fieldbus System Precautions
Industrial IoT Cybersecurity
Glossary of Fieldbus Terms
Series Variations/Applicable Valve Series
Green Procurement (RoHS)
| Series | Enclosure | Communication protocol∗ | Applicable valve |
|---|---|---|---|
| EX120 | IP20 | DeviceNet™ CC-Link CompoNet™ CompoBus/S NKE (Wiring saving system) S-LINK V (Made to order) |
JSY1000, 3000, 5000 (Plug-in) SY3000，5000，7000 (Plug-in) VQ1000，2000 SV1000，2000，3000，4000 |
| EX121 | IP20 | DeviceNet™ CC-Link CompoNet™ CompoBus/S NKE (Wiring saving system) S-LINK V (Made to order) |
SY3000，5000 |
| EX122 | IP20 | DeviceNet™ CC-Link CompoNet™ CompoBus/S NKE (Wiring saving system) S-LINK V (Made to order) |
SY3000，5000 |
| EX124 | IP65 | CC-Link CompoBus/S DeviceNet™ (Made to order) |
VQ2000，4000，5000 |
| EX126 | IP67 | CC-Link | SY3000，5000，7000 (Plug-in) SV1000，2000，3000 VQC1000，2000，4000, 5000 |
| EX140 | IP20 | DeviceNet™ CC-Link CompoBus/S NKE(Wiring saving system) |
SZ3000 SQ1000，2000 |
| EX180 | IP20 | DeviceNet™ CC-Link EtherCAT (Made to order) AnyWireASLINK (Made to order) |
SY3000，5000，7000 SJ2000，3000 S0700 |
Serial Transmission System EX600
-
For Input/Output
∗The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
▶IO-Link Devices
Safety Instructions
3/4/5 Port Solenoid Valves/Precautions
Fieldbus System Precautions
Industrial IoT Cybersecurity
Glossary of Fieldbus Terms
Series Variations/Applicable Valve Series
Green Procurement (RoHS)
| Series | Enclosure | Communication protocol∗ | Applicable valve |
|---|---|---|---|
| EX600 | IP67 | PROFIBUS DP DeviceNet™ CC-Link EtherNet/IP™ EtherCAT PROFINET PROFINET (IO-Link unit compatible) MRP (PROFINET) (Made to order) Ethernet POWERLINK (Made to order) Modbus TCP (Made to order) CC-Link IE Field (Made to order) EtherNet/IP™ (IO-Link master compatible) (Made to order) |
JSY1000, 3000, 5000 (Plug-in) SY3000，5000，7000 (Plug-in) SV1000，2000，3000 VQC1000，2000，4000，5000 S0700（IP40） |
Serial Transmission System EX500
-
For Input/Output, Gateway Type
∗The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
∗ The EX500-GDN1 series was discontinued in March 2021.
Please select the EX260-SDN series, EX600-SDN series.
Safety Instructions
3/4/5 Port Solenoid Valves/Precautions
Fieldbus System Precautions
Industrial IoT Cybersecurity
Glossary of Fieldbus Terms
Series Variations/Applicable Valve Series
Green Procurement (RoHS)
| Series | Enclosure | Communication protocol∗ | Applicable valve |
|---|---|---|---|
| EX500 | IP67 | EtherNet/IP™ PROFINET DeviceNet™ PROFIBUS DP |
SY3000，5000，7000 (Plug-in) VQC1000，2000，4000，5000 SV1000，2000，3000 S0700（IP40） |
Serial Transmission System EX510
-
For Input/Output, Gateway Type
∗The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
Safety Instructions
3/4/5 Port Solenoid Valves/Precautions
Fieldbus System Precautions
Industrial IoT Cybersecurity
Glossary of Fieldbus Terms
Series Variations/Applicable Valve Series
Green Procurement (RoHS)
| Series | Enclosure | Communication protocol∗ | Applicable valve |
|---|---|---|---|
| EX510 | IP20 | CC-Link DeviceNet™ PROFIBUS DP EtherNet/IP™ (Made to order) PROFINET (Made to order) |
SJ2000，3000 SY3000，5000，7000 (Plug-in) SY3000，5000，7000，9000 SYJ3000，5000，7000 SQ1000，2000 SZ3000 VQ1000，2000 VQZ1000，2000，3000 S0700 |
Serial Transmission System EX250
-
For Input/Output
∗The applicable protocols differ depending on the series.
For details, refer to the catalog of each series.
Safety Instructions
3/4/5 Port Solenoid Valves/Precautions
Fieldbus System Precautions
Industrial IoT Cybersecurity
Glossary of Fieldbus Terms
Series Variations/Applicable Valve Series
Green Procurement (RoHS)
| Series | Enclosure | Communication protocol∗ | Applicable valve |
|---|---|---|---|
| EX250 | IP67 | DeviceNet™ PROFIBUS DP CC-Link AS-Interface CANopen EtherNet/IP™ |
JSY1000, 3000, 5000 (Plug-in) SY3000，5000，7000 (Plug-in) VQC1000，2000，4000，5000 SV1000，2000，3000 S0700（IP40） |
Step Motor Controller JXCE1/91/P1/D1/L□/M1
-
・EtherCAT, EtherNet/IP™, PROFINET, DeviceNet®,
IO-Link, and CC-Link compatible
・Two types of operation command:
Step no. defined operation, Numerical data defined operation
・Transition wiring of communication cables
・Numerical monitoring available
・IO-Link communication can be performed.
・Controller with STO sub-function/JXC□F
Safety Instructions
Electric Actuators/Precautions
Features
Series Variations
Simplified Selection Flow Chart
Green Procurement (RoHS)
CE/UL-compliance List
| Series | Compatible motor |
Power supply voltage |
Fieldbus |
|---|---|---|---|
| JXCE1 (Standard) JXCEF (With subfunction) |
Step motor (Servo/24 VDC) |
24 VDC ±10% |
EtherCAT™ |
| JXC91 (Standard) JXC9F (With subfunction) |
Step motor (Servo/24 VDC) |
24 VDC ±10% |
EtherNet/IP™ |
| JXCP1 (Standard) JXCPF (With subfunction) |
Step motor (Servo/24 VDC) |
24 VDC ±10% |
PROFINET |
| JXCD1 (Standard) | Step motor (Servo/24 VDC) |
24 VDC ±10% |
DeviceNet™ |
| JXCL1 (Standard) JXCLF (With subfunction) |
Step motor (Servo/24 VDC) |
24 VDC ±10% |
IO-Link |
| JXCM1 (Standard) | Step motor (Servo/24 VDC) |
24 VDC ±10% |
CC-Link |
Fieldbus-compatible Gateway (GW) Unit LEC-G
-
・The LE□ series electric actuators are applicable to Fieldbus protocols.
・Conversion unit for Fieldbus network and LEC serial communication
・2 methods of operation:
Step data input, numerical data input
・Position, speed, and other values can be checked on the PLC.
Safety Instructions
Electric Actuators/Precautions
Features
Series Variations
Simplified Selection Flow Chart
Wiring Method
Green Procurement (RoHS)
CE/UL-compliance List
| Series | Applicable fieldbus | Power supply voltage | Applicable controllers |
|---|---|---|---|
| LEC-G | CC-Link DeviceNet™ PROFIBUS DP EtherNet/IP™ |
24 VDC ±10% |
LECA6 series |
Electro-Pneumatic Regulator ITV
-
・Stepless control of air pressure in proportion to electrical signals
・Sensitivity: 0.2 kPa (100 kPa specification)
・Linearity: ±1% or less (F.S.)
・Hysteresis: 0.5% or less (F.S.)
・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C, IO-Link
▶IO-Link Master
Safety Instructions
F.R.L. Units/Precautions
Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
IO-Link Master
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| ITV0000 | Built-in One-touch fitting φ4，φ5/32 |
0.001 to 0.1 0.001 to 0.5 0.001 to 0.9 |
| ITV1000 | 1/8，1/4 | 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 |
| ITV2000 | 1/4，3/8 | 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 |
| ITV3000 | 1/4，3/8，1/2 | 0.005 to 0.1 0.005 to 0.5 0.005 to 0.9 |
Electronic Vacuum Regulator ITV
-
・Stepless control of vacuum pressure in proportion to electrical signals
・Communication: CC-Link, DeviceNet™, PROFIBUS DP, RS-232C
Safety Instructions
F.R.L. Units/Precautions
Series Variations/Pressure Control Equipment
Green Procurement (RoHS)
| Series | Port size | Set pressure (MPa) |
|---|---|---|
| ITV009□ | Built-in One-touch fitting φ4，φ5/32 |
－1 to －100 |
| ITV209□ | 1/4 | －1.3 to －80 |
Water-cooled Thermo-chiller/High-performance Type HRW
-
・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.
Safety Instructions
Temperature Control Equipment/Precautions
Features/Series Variations
Technical Data
Temperature Control Equipment Warranty
Green Procurement (RoHS)
| Series | Set temperature range |
Cooling capacity |
Temperature stability |
Cooling method |
Circulating fluid |
|---|---|---|---|---|---|
| HRW | 20 to 90℃ | 2 kW, 8 kW, 15 kW, 30 kW | ±0.3℃ | Water-cooled type (Without compressor) |
Fluorinated, Tap water, Deionized water, Ethylene glycol aqueous solution (60%) |
