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Process Gas Equipment
Process Gas Equipment
Diaphragm Valve for Ultra High Purity AP
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・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve
・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.
Safety Instructions
Process Gas Equipment/Common Precautions
Series Variations
Valve and Regulator Recommendations
Technical Data/Glossary of Terms
Green Procurement (RoHS)
| Series | Type | Body material | Connection type | Connection size |
|---|---|---|---|---|
| AP | Air operated type | 316L SS secondary remelt |
Face seal Tube weld |
1/4''，3/8'' 1/2''，3/4'' |
| AP | Manually operated | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
Features
■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.
