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Process Gas Equipment
Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ
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・For UHP gas delivery in semiconductor and other clean industries
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・External metal seal construction
Safety Instructions
Process Gas Equipment/Common Precautions
Series Variations
Valve and Regulator Recommendations
Technical Data/Glossary of Terms
Green Procurement (RoHS)
| Series | Type | Application | Body material | Connection type | Connection size |
|---|---|---|---|---|---|
| AP/SL | Single stage | Distribution (Compact) | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' |
| AP/SL | Single stage | Distribution | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
| AP/SL | Single stage | Bulk gas | 316L SS | Face seal Tube weld |
1/2'', 3/4'', 1'' |
| AP/SL | Single stage | Source | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
| AP/SL | Single stage | Sub-atmospheric pressure | 316L SS secondary remelt |
Face seal Tube weld |
1/4'', 3/8'' 1/2'', 3/4'' |
| AP | Two stage | Source | 316L SS secondary remelt |
Face seal Tube weld |
1/4''，3/8'' |
| AZ | Single stage | Distribution | 316L SS | Face seal Tube weld |
1/4'', 3/8'' 1/2'' |
| AZ | Single stage | Source | 316L SS | Face seal Tube weld |
1/4'', 3/8'' 1/2'' |
| AZ | Single stage | Sub-atmospheric pressure | 316L SS | Face seal Tube weld |
1/4'', 3/8'' 1/2'' |
Features
■Regulators for Ultra High Purity (UHP) Series AP/SL/AZ
- For UHP gas delivery in semiconductor and other clean industries.
- Body material: 316L SS secondary remelt or 316L SS
- Electropolished wetted parts
- Metal seal to atmosphere
■Regulator/Back Pressure Regulator for General Applications Series AK/BP
- For wide variety of applications from semiconductor to general.
- Body material 316 SS or brass available depending on gas.
■Diaphragm Valve for Ultra High Purity Series AP
- For UHP gas delivery in semiconductor and other clean industries.
- Used as gas shutoff valve.
- No spring is used for the wetted parts and drive part is also separated
from the diaphragm. Dead space in the flow path is small to suppress
the particle generation.
■Check Valve/Vacuum Generator/Flow Switch Series AP
[Check valve]
- Fluid back-flow is prevented by back pressure.
- Unique design with only one moving part in the gas stream, an O-ring.
- Springless structure suppresses particle generation by vibration or
chattering or pressure fluctuation on downstream side.
[Vacuum generator]
- Vacuum generation equipment.
- Applicable to emission of unnecessary gas remaining inside the
piping during gas cylinder replacement.
[Flow switch]
- Detects excess flow above a given flow rate, caused by pipe breakage, etc.
