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Compact 2/3 Port Solenoid Valves

Normal Close High Vacuum Solenoid Valve XSA

    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions　 Green Procurement (RoHS)　
Series Valve type Fluid Piping Port size
XSA Normally closed Air
Inert gas		 Face seal fitting
Compression fitting		 1/4, 3/8
XSA Normally closed Air
Inert gas		 Rc, NPT female thread 1/8, 1/4, 3/8

Features

■Minimum operating pressure：1×10-6Pa(abs)
■Leakage：Internal 1.3×10-9Pa・m3/s, External 1.3×10-11Pa・m3/s
■2 types of fitting and female threads available

Face seal fitting

A fitting with high leak integrity from vacuum to positive pressure, that forms a seal through the placement of a metal gasket at the end of the sleeve and the tightening of the nut.

Compression fitting

A self-aligning tube fitting that uses ferrule rings to compress the tubing, affecting the seal when the nut is tightened.

Female thread(Rc, NPT) [New]






■Power consumption
■Weight
■Fluid temperature：5 to 60℃
■Reverse pressure potential：0.5 MPa(G)※

※ XSA1-12

■Rated voltage
■Applications
■Variations

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