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- Air Management System
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Directional Control Valves
- Pilot Operated 4/5 Port Solenoid Valves
- Pilot Operated 3 Port Solenoid Valves
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- Reduced-wiring Fieldbus System (Serial Transmission System)
- Air Operated Valves
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Air Cylinders
- Standard Air Cylinders (Round Type）
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- Rotary Actuators/Air Grippers
- Electric Actuators/Cylinders
- Vacuum Equipment (Vacuum Generators/Vacuum Suction Cups/Other)
- Air Preparation Equipment
- Modular F.R.L./Pressure Control Equipment
- Lubrication Equipment
- Fittings and Tubing
- Flow Control Equipment
- Silencers/Exhaust Cleaners/Blow Guns/Pressure Gauges
- Switches/Sensors/Controller
- Static Neutralization Equipment
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Industrial Device Communication Equipment/Wireless System
- Wireless System: PROFINET Compatible Products
- Wireless System: EtherNet/IP Compatible Products
- Wireless System: IO-Link Compatible Products
- Wireless System: CC-Link Compatible
- Industrial Device Communication Equipment: PROFINET Compatible Products
- Industrial Device Communication Equipment: EtherNet/IP Compatible Products
- Industrial Device Communication Equipment: EtherCAT Compatible Products
- Industrial Device Communication Equipment: Modbus TCP Compatible Products
- Industrial Device Communication Equipment: ETHERNET POWERLINK Compatible Products
- Industrial Device Communication Equipment: CC-Link IE Field Compatible Products
- Industrial Device Communication Equipment: SSCNET III Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅲ Compatible Products
- Industrial Device Communication Equipment: PROFIsafe Compatible Products
- Industrial Device Communication Equipment: IO-Link Compatible Products
- Industrial Device Communication Equipment: PROFIBUS Compatible Products
- Industrial Device Communication Equipment: DeviceNet Compatible Products
- Industrial Device Communication Equipment: CC-Link Compatible Products
- Industrial Device Communication Equipment: AS-interface Compatible Products
- Industrial Device Communication Equipment: CANopen Compatible Products
- Industrial Device Communication Equipment: CompoNet Compatible Products
- Industrial Device Communication Equipment: Interbus Compatible Products
- Industrial Device Communication Equipment: MECHATROLINK-Ⅱ Compatible Products
- Other: RS232C Compatible Products
- Other: RS485 Compatible Products
- Process Valves
- Chemical Liquid Valves/Fittings & Needle Valves/Tubing
- Process Pumps(Diaphragm Pumps)
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Temperature Control Equipment
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Standard Type/Basic Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Dual Channel Thermo chiller for Lasers
- Thermo-Chillers (Circulating Fluid Temperature Controllers) Rack Mount Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type
- Thermo-Chillers (Circulating Fluid Temperature Controllers)
- Thermo-cons/Thermoelectric Baths (Peltier-Type Temperature Control Equipment)
- Air Temperature Controllers
- Process Gas Equipment
- High Vacuum Equipment
- Industrial Filters/Sintered Metal Elements
- Pneumatic Instrumentation Equipment
- Hydraulic Equipment
Theme
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Clean Series/Low-Particle Generation
- Directional Control Valves
- Air Cylinders
- Rotary Actuators
- Air Grippers
- Air Dryers
- Compressed Air Cleaning Filter Series
- Clean Gas Filters/Air Filters
- Exhaust Cleaner for Clean Room/Clean Exhaust Filter
- Modular F.R./Pressure Control Equipment
- Fittings
- Tubing
- Flow Control Equipment
- Switches/Sensors
- Flow Switch
- Electric Actuators
- Fluoropolymer Equipment/PVC Equipment
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Series Compatible with Secondary Batteries Series 25A-
- Directional Control Valves
- Actuators
- Related Products
- Rotary Actuators/Air Grippers
- Vacuum Equipment
- Air Preparation Equipment/Clean Air Filters
- ModularF.R.L./Pressure Control Equipment
- Flow Control Equipment/Fittings
- Tubings
- Detection Switches/Auto Switches
- Process Valves
- Process Gas Equipment
- Electric Actuators
- Copper, Fluorine-free Equipment Series 20-
- ISO Products
- Arc Welding Process Equipment
- IO-Link Devices
- List of ATEX Compliant Products
Slit Valve XGT
High Vacuum Equipment » Slit Valves
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・This product is suitable to act as the partition valve between the load lock chamber and the transfer chamber or between the transfer chamber and the process chamber in semiconductor equipment or other equipment.
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2D/3D CAD
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Slit Valve XGT
Manual
Series View search result XGT View search result
| Series | Operating environmental pressure (Pa)(abs) |
Fluid | Opening window size (Height x Width) (mm) |
Operating pressure (MPa)(G) |
|---|---|---|---|---|
| XGT | Atmospheric pressure to 10-6 |
Inert gas type vacuum | 32 x 222 46 x 236 50 x 336 |
0.45 to 0.6 |
