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Thermo-Chillers (Circulating Fluid Temperature Controllers) High performance/Type & Inverter Type

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EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F

Features
    ・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
    ・Energy saving
    　The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
    　Power consumption: Max. 65% reduction
    　Facility water: Max. 67% reduction
    ・High performance
    　Temperature stability: ±0.1°C (When a load is stable)
    　Cooling time: Max. 46% reduction (SMC comparison)
    ・Refrigerant: R410A (HFC)/R448A (HFC/HFO)
  • EU F-Gas Regulation-compliant Refrigerated Thermo-chiller HRZ-F
    Manual
    Series View search result
    HRZ-F View search result
Safety Instructions　 Temperature Control Equipment/Precautions　 Features/Series Variations　 Technical Data　 Temperature Control Equipment Warranty　 Green Procurement (RoHS)　
Series Set temperature
range		 Cooling
capacity		 Temperature
stability		 Cooling
method		 Circulating fluid
HRZ-F -20 to 40℃
10 to 60℃
-20 to 90℃		 2 kW, 4 kW, 8 kW, 10 kW ±0.1℃ Water-cooled
refrigeration		 Fluorinated fluids
Ethylene glycol aqueous solution
Tap water/Deionized water

Water-cooled Thermo-chiller/High-performance Type HRW

    ・Direct heat exchanger for in-plant circulating fluid
    ・Can control the temperature over a wide range since a compressor is not required.
    ・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
    ・Compliant with UL Standards, SEMI Standards, CE-marking
    ・It is possible to select the inverter type.
Safety Instructions　 Temperature Control Equipment/Precautions　 Features/Series Variations　 Technical Data　 Temperature Control Equipment Warranty　 Green Procurement (RoHS)　
Series Set temperature
range		 Cooling
capacity		 Temperature
stability		 Cooling
method		 Circulating fluid
HRW 20 to 90℃ 2 kW, 8 kW, 15 kW, 30 kW ±0.3℃ Water-cooled type
(Without compressor)		 Fluorinated, Tap water, Deionized water,
Ethylene glycol aqueous solution (60%)

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