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                            Compact 2/3 Port Solenoid Valves
                        
                            
                
                
                
                
                
                                    Compact 2/3 Port Solenoid Valves
Compact Direct Operated 2 Port Solenoid Valve (2 Way Valve) VDW
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    ・For air, medium vacuum, water
・Body material: Aluminum, Resin (PPS), Brass, Stainless steel
・With One-touch fittings (resin body)
・IP65
                    Safety Instructions 
                    2 Port Solenoid Valves for Fluid Control Precautions 
                    Model Selection/Flow Rate Characteristics 
                    Series Variations/Solenoid Valves List 
                    Green Procurement (RoHS) 
                
        
    | Series | Valve type | Port size | Orifice diameter | 
|---|---|---|---|
| VDW10/20 | N.C. | φ3.2, φ4, φ6, M5, 1/8 | φ1 to φ3.2 | 
Compact Direct Operated 3 Port Solenoid Valve (3 Way Valve) for Water and Air VDW
 
                                - 
                
    ∗ The production of the VDW10/20 series was discontinued
in December 2012. Please select the new VDW10/20 series.
∗ Excludes the VDW10/20 series manifold
∗ The production of the VDW30 series was discontinued
in July 2015. Please select the VX21 series.
∗ The production of the 3-port solenoid valve VDW200/300 series
is continued.
                    Safety Instructions 
                    2 Port Solenoid Valves for Fluid Control Precautions 
                    Model Selection/Technical Data 
                    Series Variations/Solenoid Valves List 
                    Green Procurement (RoHS) 
                
        
    | Series | Valve type | Port size | Orifice diameter (mmø) | 
|---|---|---|---|
| VDW200/300 | C.O. | M5 to 1/4 (8A) | 1 to 4 | 
Compact/Lightweight 2 Port Solenoid Valve (2 Way Valve) for Water and Air VDW-XF
 
                                - 
                
    ・Compact, lightweight resin body (PPS)
・IP65
・Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)
                    Safety Instructions 
                    2 Port Solenoid Valves for Fluid Control Precautions 
                    Model Selection/Flow Rate Characteristics 
                    Series Variations/Solenoid Valves List 
                    Green Procurement (RoHS) 
                
        
    | Series | Valve type | Port size | Orifice diameter (mmø) | 
|---|---|---|---|
| VDW30/40-XF | N.C. | P7, P8 (Quick fastener) ø4, ø6, ø8, ø10 | 1 to 6 | 
High Speed 2 Port Valve (2 Way Valve) SX10
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    ・High-speed response ON: 0.45 ms,  OFF: 0.4 ms (±0.05 ms)
・Long service life: 5 billion cycles or more
・High frequency: 1200 Hz
・Width: 9 mm
・Low power consumption: 4 W
| Series | Flow rate (L/min) | Power consumption (W) | Max. operating frequency (Hz) | 
|---|---|---|---|
| SX10 | 50 | 80 40 10 4 | 1200 1000 550 350 | 
| SX10 | 100 | 80 40 10 4 | 650 550 300 200 | 
| SX10 | 150 | 80 40 10 4 | 600 500 250 150 | 
Low Profile 2/3-Port Solenoid Valve SX90/090
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    ・Compact
Overall length: Approx. 38 mm (2-port), 54 mm (3-port)
Valve width/height: 10 mm
Weight: 10 g (2-port), 20 g (3-port)
・Large flow rate
C [dm3/(s·bar)]: 0.25 (2-port), 0.5 (3-port)
Flow rate [L/min (ANR)]: 45 (2-port), 90 (3-port) (At 0.2 MPa)
| Series | Valve construction | C[dm3/(s·bar)] | Flow rate [L/min (ANR)] at 0.2 MPa | Type of actuation | 
|---|---|---|---|---|
| SX91 | 2-port direct operated poppet valve | 0.25 | 45 | Normally closed | 
| SX92 | 2-port direct operated poppet valve | 0.12 | 22 | Universal | 
| SX090 | 3-port direct operated poppet valve | 0.5 | 90 | Universal | 
Pilot Operated 2 Port Solenoid Valve (2 Way Valve) for Dry Air
 VQ
        
     
                                - 
                
    ・High-frequency operation is possible: High-speed response 7 ms or less (VQ20), 20 ms or less (VQ30)
・Easy piping with One-touch fittings
・The dust-tight, water-jet-proof enclosure (IP65) is compatible with the DIN terminal type.
・Applications: Air-blow, Blow-off of workpieces, etc.
・Manifold type no.: VV2Q22, VV2Q32
                    Safety Instructions 
                    2 Port Solenoid Valves for Fluid Control Precautions 
                    Model Selection/Flow Rate Characteristics 
                    Series Variations/Solenoid Valves List 
                    Green Procurement (RoHS) 
                
        
    | Series | Valve type | Port size | Orifice diameter (mmø) | 
|---|---|---|---|
| VQ20 | N.C. | φ6 to φ12 | 3.4 | 
| VQ30 | N.C. | φ6 to φ12 | 4.8 | 
Impact Blow Valve IBV1□-X5/X7(-Q)
 
                                - 
                
    ・Increased impact force due to higher peak pressure
Drastic reduction in air consumption and labor time
High peak pressure: 3 times or more (Compared with the existing model)
Air consumption: 93% reduction
・Compact design allows for installation in narrow spaces.
| Series | Port size | Enclosure | 
|---|---|---|
| IBV1□-X5 L plug connector specifications | IN port: Rc3/8 OUT port: Rc1/4 | Dustproof | 
| IBV1□-X7 M8 connector specifications | IN port: Rc3/8 OUT port: Rc1/4 | IP65 | 
Pulse Blow Valve AXTS040□-□□-X2
- 
                
    ・The peak pressure of repeatedly colliding air permits efficient blowing.
・Air consumption: Reduced by 50% or more
・Control for pulse generation is not required.
Pulse blow can be used by simply supplying air.
| Series | Valve construction | Type of actuation | Frequency adjustment range | 
|---|---|---|---|
| AXTS040□-2□-X2 | Metal seal | Internal pilot | 1 to 5Hz | 
| AXTS040□-3□-X2 | Metal seal | External pilot | 1 to 8Hz | 
Compact Direct Operated 2/3-Port Solenoid Valve for Chemical Liquids LVM
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    ・Low particle generation, Oil-free, Metal-free * Fluid contact parts
・Isolated structure
The solenoid drive body is separated from the fluid area by a diaphragm.
・Power consumption: 1.0 W or less (With power saving circuit)
・Change in volume (Pumping volume): 0.01 µL or less
                    Safety Instructions 
                    2 Port Solenoid Valves for Fluid Control Precautions 
                    Model Selection/Flow Rate Characteristics 
                    Series Variations/Solenoid Valves List 
                    Green Procurement (RoHS) 
                
        
    | Series | Valve construction | Valve type | Operating pressure range | Orifice diameter (mmø) | 
|---|---|---|---|---|
| LVM07 Base mounted | Direct operated rocker type | N.C. | -75 kPa to 0.1 MPa | 0.8 | 
| LVM09 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.2 MPa | 1 (Body ported) 1.1 (Base mounted) | 
| LVM10 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.25 MPa | 1.4 | 
| LVM15 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.25 MPa (Max. 0.6 MPa) | 1.6 1 (High-pressure type) | 
| LVM20 Body ported Base mounted | Direct operated rocker type | N.C. N.O. Universal | -75 kPa to 0.3 MPa (Body ported: 0.25 MPa) | 2 | 
| LVM1□ Body ported Base mounted | Direct operated poppet type | N.C. | 0 to 0.25 MPa | 1.5 | 
Direct Operated 2/3 Port Isolated Valve LVMK20/200
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    ・Low particle generation, Oil-free, Metal-free
・Fluids: Air, Water, Deionized water, Diluent, Cleaning fluid
・Isolated structure: The solenoid drive body is separated from the fluid area by a block seal.
・Easy piping
・Minimal dead space
・Flow adjustment is not required.
| Series | Valve type | Piping direction | Fluid contact material | 
|---|---|---|---|
| LVMK | N.C. Universal | Bottom ported Side ported | Body: PPS Seal: EPDM, FKM | 
Pinch Valve LPV
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    ・Highly resistant to contamination and reduces valve failures
・Applicable tubing:
Silicone, PharMed®BPT, Tygon®
・Power consumption: 2.0 W
・Compact: Valve width 20 mm
・Easy tubing replacement
| Series | Type of actuation | Valve type | Applicable tubing | 
|---|---|---|---|
| LPV | Direct operated solenoid | N.C. N.O. | Silicone, PharMed®BPT “Hardness of 64 (shore A) or lower (reference)” | 
Diaphragm Valve for Ultra High Purity AZ
 
                                - 
                
    ・Cleaned for high purity semiconductor applications and clean room assembled
・Helium leak tested
・SEMI Standards compliant
・User-friendly forged body
                    Safety Instructions 
                    Process Gas Equipment/Common Precautions 
                    Series Variations 
                    Valve and Regulator Recommendations 
                    Technical Data/Glossary of Terms 
                    Green Procurement (RoHS) 
                
        
    | Series | Type | Body material | Connection type | Connection size | 
|---|---|---|---|---|
| AZ | Air operated type | 316L SS | Face seal Tube weld | 1/4'' 3/8'' 1/2 | 
| AZ | Manually operated | 316L SS | Face seal Tube weld | 1/4'' 3/8'' 1/2 | 
Normal Close High Vacuum Solenoid Valve XSA
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    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
・2 types of fittings and female threads are available.
・Power consumption: Max. 25% reduction
・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
| Series | Valve type | Fluid | Piping | Port size | 
|---|---|---|---|---|
| XSA | Normally closed | Air Inert gas | Face seal fitting Compression fitting | 1/4, 3/8 | 
| XSA | Normally closed | Air Inert gas | Rc, NPT female thread | 1/8, 1/4, 3/8 | 
















 
                     
                     
                     
                    
 
                     
                 
                 
                 
                 
                            
                 
                            
                 
                            
                 
                            
                 
                            
                 
                            
                 
                            
                 
                            
                
