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Regulators for Ultra High Purity (UHP) AP/SL/AP/AZ

Process Gas Equipment » Process Gas Equipment
Features
    ・For UHP gas delivery in semiconductor and other clean industries
    ・Body material: 316L SS secondary remelt or 316L SS
    ・Electropolished wetted parts
    ・External metal seal construction
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　 Process Gas Equipment/Common Precautions　 Series Variations　 Valve and Regulator Recommendations　 Technical Data/Glossary of Terms　 Green Procurement (RoHS)　
Series Type Application Body material Connection type Connection size
AP/SL Single stage Distribution (Compact) 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
AP/SL Single stage Distribution 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''
AP/SL Single stage Bulk gas 316L SS Face seal
Tube weld		 1/2'', 3/4'', 1''
AP/SL Single stage Source 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''
AP/SL Single stage Sub-atmospheric pressure 316L SS
secondary remelt		 Face seal
Tube weld		 1/4'', 3/8''
1/2'', 3/4''
AP Two stage Source 316L SS
secondary remelt		 Face seal
Tube weld		 1/4''，3/8''
AZ Single stage Distribution 316L SS Face seal
Tube weld		 1/4'', 3/8''
1/2''
AZ Single stage Source 316L SS Face seal
Tube weld		 1/4'', 3/8''
1/2''
AZ Single stage Sub-atmospheric pressure 316L SS Face seal
Tube weld		 1/4'', 3/8''
1/2''

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