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Aluminum High Vacuum Angle Valve XL□
High Vacuum Equipment » High Vacuum Valves
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・High fluorine resistance
・Minimal outgassing
・Minimal contamination from heavy metals
∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
discontinued in September 2017.
Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions
System Configuration/Series Variations
Auto Switches Common Specifications
Green Procurement (RoHS)
| Series | Actuation | Valve type |
Shaft seal type |
Application | Flange size |
|---|---|---|---|---|---|
| XLA | Air operated |
Single acting (N.C.) |
Bellows seal | Dust-free Cleaned |
16 to 160 |
| XLAV (With solenoid valve) |
Air operated |
Single acting (N.C.) |
Bellows seal | Dust-free Cleaned |
16 to 160 |
| XLC | Air operated |
Double acting |
Bellows seal | Dust-free Cleaned |
16 to 160 |
| XLCV (With solenoid valve) |
Air operated |
Double acting |
Bellows seal | Dust-free Cleaned |
16 to 80 |
| XLF | Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLFV (With solenoid valve) |
Air operated |
Single acting (N.C.) |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLG | Air operated |
Double acting |
O-ring seal | High-speed operation High operating cycles |
16 to 160 |
| XLGV (With solenoid valve) |
Air operated |
Double acting |
O-ring seal | High-speed operation High operating cycles |
16 to 80 |
| XLD | Air operated |
Single acting (N.C.) |
Bellows/O-ring seal |
For preventing dust turbulence For preventing a pump from running overloaded |
25 to 160 |
| XLDV (With solenoid valve) |
Air operated |
Single acting (N.C.) |
Bellows/O-ring seal |
For preventing dust turbulence For preventing a pump from running overloaded |
25 to 160 |
| XLH | Manual | Manual | Bellows seal | Dust-free Cleaned |
16 to 50 |
| XLS | Electromagnetic | Single acting (N.C.) |
(Bellows balance) | For portable equipment not requiring air |
16, 25 |
