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High Vacuum Valves

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Aluminum High Vacuum Angle Valve XLA/C/F/G

Features
    ・Aluminum bodied
    　Uniform baking temperature
    　Lightweight, Compact
    　Minimal outgassing
    　Minimal contamination from heavy metals
    ・Bellows are replaceable.
Safety Instructions　 Auto Switches Common Specifications　 Green Procurement (RoHS)　
Series Actuation Valve
type		 Shaft seal
type		 Application Flange
size
XLA-2 Air
operated		 Single
acting
(N.C.)		 Bellows seal Dust free,
Cleaned		 16 to 80
XLAV-2
(With solenoid valve)		 Air
operated		 Single
acting
(N.C.)		 Bellows seal Dust free,
Cleaned		 16 to 80
XLC-2 Air
operated		 Double
acting		 Bellows seal Dust free,
Cleaned		 16 to 80
XLF-2 Air
operated		 Single
acting
(N.C.)		 O-ring seal High-speed operation,
High operating cycles		 16 to 80
XLFV-2
(With solenoid valve)		 Air
operated		 Single
acting
(N.C.)		 O-ring seal High-speed operation,
High operating cycles		 16 to 80
XLG -2 Air
operated		 Double
acting		 O-ring seal High-speed operation,
High operating cycles		 16 to 80

Aluminum High Vacuum Angle Valve XLA/C-100/160(-1)-X152

Features
    ・Improved durability of bellows (Flange sizes 100 and 160)
    ・Service life of two million cycles
    ・Space required for equipment can be reduced
    　Without restriction on exhaust direction (two ways: from valve element side to bellows side and vice versa)
    　Increased flexibility of mounting orientation
    ・Lightweight, Compact
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
Safety Instructions　 Auto Switches Common Specifications　 Green Procurement (RoHS)　
Series Actuation Valve
type		 Shaft seal
type		 Application Flange
size
XLA-100/160-X152 Air
operated		 Single
acting
(N.C.)		 Bellows seal Dust free,
Cleaned		 100，160
XLC-100/160-1-X152 Air
operated		 Double
acting		 Bellows seal Dust free,
Cleaned		 100，160

Aluminum High Vacuum Angle Valve XL□

Features
    ・High fluorine resistance
    ・Minimal outgassing
    ・Minimal contamination from heavy metals

    ∗ The XLA(V)/C/F(V)/G with flange sizes of 16 to 80 has been
    　discontinued in September 2017.
    　Please select the XLA(V)-2/XLC-2/XLF(V)-2/XLG-2 series.
Safety Instructions　 System Configuration/Series Variations　 Auto Switches Common Specifications　 Green Procurement (RoHS)　
Series Actuation Valve
type		 Shaft seal
type		 Application Flange
size
XLA Air
operated		 Single
acting
(N.C.)		 Bellows seal Dust-free
Cleaned		 16 to 160
XLAV
(With solenoid valve)		 Air
operated		 Single
acting
(N.C.)		 Bellows seal Dust-free
Cleaned		 16 to 160
XLC Air
operated		 Double
acting		 Bellows seal Dust-free
Cleaned		 16 to 160
XLCV
(With solenoid valve)		 Air
operated		 Double
acting		 Bellows seal Dust-free
Cleaned		 16 to 80
XLF Air
operated		 Single
acting
(N.C.)		 O-ring seal High-speed operation
High operating cycles		 16 to 160
XLFV
(With solenoid valve)		 Air
operated		 Single
acting
(N.C.)		 O-ring seal High-speed operation
High operating cycles		 16 to 160
XLG Air
operated		 Double
acting		 O-ring seal High-speed operation
High operating cycles		 16 to 160
XLGV
(With solenoid valve)		 Air
operated		 Double
acting		 O-ring seal High-speed operation
High operating cycles		 16 to 80
XLD Air
operated		 Single
acting
(N.C.)		 Bellows/O-ring
seal		 For preventing dust turbulence
For preventing a pump from
running overloaded		 25 to 160
XLDV
(With solenoid valve)		 Air
operated		 Single
acting
(N.C.)		 Bellows/O-ring
seal		 For preventing dust turbulence
For preventing a pump from
running overloaded		 25 to 160
XLH Manual Manual Bellows seal Dust-free
Cleaned		 16 to 50
XLS Electromagnetic Single
acting
(N.C.)		 (Bellows balance) For portable equipment not
requiring air		 16, 25

Aluminum One-touch Connection and Release High Vacuum Angle Valve XLAQ/XLDQ

    ・One-touch connection and release (No tools are required.)
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　 System Configuration/Series Variations　 Auto Switches Common Specifications　 Green Procurement (RoHS)　
Series Actuation Shaft seal
type		 Valve
type		 Material Flange
size
XLAQ Air
operated		 Bellows seal Single acting
(N.C.)		 Body : Aluminum
Bellows : Stainless steel 316L		 16 to 50
XLDQ Air
operated		 Bellows seal
O-ring seal		 Single acting
(N.C.)		 Body : Aluminum
Bellows : Stainless steel 316L		 40, 50

Stainless Steel High Vacuum Angle/In-line Valve XM/XY

    ・The precision casting, unified composition prevents the accumulation of gas.
    ・The XM series is interchangeable with the XL series aluminum high vacuum angle valve.

    Note) Size 16 is not available for the in-line type.
Safety Instructions　 System Configuration/Series Variations　 Auto Switches Common Specifications　 Green Procurement (RoHS)　
Series Actuation Shaft seal
type		 Valve
type		 Material Flange
size
XMA/XYA Air operated Bellows seal Single acting
(N.C.)		 Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		 16 to 80 Note)
XMC/XYC Air operated Bellows seal Double acting Body : SCS13 (Eequivalent to
stainless steel 304)
Bellows : Stainless steel 316L		 16 to 80 Note)
XMD/XYD Air operated Bellows/O-ring
seal		 Single acting
(N.C.)		 Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		 25 to 80
XMH/XYH Manual Bellows seal Manual Body : SCS13 (Equivalent to
stainless steel 304)
Bellows : Stainless steel 316L		 16 to 50 Note)

Normal Close High Vacuum Solenoid Valve XSA

Features
    ・Minimum operating pressure: 1 × 10-6 Pa (abs)
    ・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
    ・2 types of fittings and female threads are available.
    ・Power consumption: Max. 25% reduction
    ・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)
Safety Instructions　 Green Procurement (RoHS)　
Series Valve type Fluid Piping Port size
XSA Normally closed Air
Inert gas		 Face seal fitting
Compression fitting		 1/4, 3/8
XSA Normally closed Air
Inert gas		 Rc, NPT female thread 1/8, 1/4, 3/8

Smooth Vent Valve XVD

    ・The valve/needle valve-integrated construction requires only 1/4 the piping space of previous models.
    ・Particle numbers have been significantly reduced through the use of a metal diaphragm in the sheet portion.
    ・Flow of both the initial air supply and the main air supply can be adjusted.
  • 2D/3D CAD

    The new SMC CAD SYSTEM, CADENAS, allows you to output 2D/3D CAD data with full part numbers in various data formats. Responses to part number selection has been greatly improved with the newly developed system.

    Click here for 2D/3D CAD
    2D CAD
    Click here for 2D CAD
Safety Instructions　 System Configuration/Series Variations　 Green Procurement (RoHS)　
Series Valve type Fluid Piping Port size
XVD Normally closed
(Pressurize to open, Spring seal)		 Nitrogen, Air,
Inert gas, etc.		 VCR®
Swagelok®		 1/4B

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